发明申请
- 专利标题: MANUFACTURING METHOD OF LIQUID DISCHARGE HEAD
- 专利标题(中): 液体放电头的制造方法
-
申请号: US11693122申请日: 2007-03-29
-
公开(公告)号: US20070243330A1公开(公告)日: 2007-10-18
- 发明人: Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
- 申请人: Hirokazu Komuro , Makoto Kurotobi , Tadashi Atoji , Takehito Okabe
- 申请人地址: JP TOKYO
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP TOKYO
- 优先权: JP2006-110941 20060413
- 主分类号: B05D3/00
- IPC分类号: B05D3/00 ; B05D3/12
摘要:
Disclosed is a manufacturing method of a liquid discharge head having a discharge port which discharges a liquid, a flow path which communicates with the discharge port, a heating portion which is disposed correspondingly to the flow path and which generates heat energy for use in discharging the liquid from the discharge port and a protective layer which prevents the heating portion from being brought into contact with the liquid, the method comprising: forming porous silicon from a surface to an inner portion of a silicon substrate; sealing pores present in the surface of the porous silicon to smoothen the surface of the porous silicon; forming the protective layer on the smoothened surface of the porous silicon; forming the heating portion on the protective layer; forming the discharge port; and removing the porous silicon to form the flow path.
信息查询