- 专利标题: ELECTRICALLY PROGRAMMABLE PI-SHAPED FUSE STRUCTURES AND METHODS OF FABRICATION THEREOF
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申请号: US11768254申请日: 2007-06-26
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公开(公告)号: US20070247273A1公开(公告)日: 2007-10-25
- 发明人: Roger Booth , Kangguo Cheng , Jack Mandelman , William Tonti
- 申请人: Roger Booth , Kangguo Cheng , Jack Mandelman , William Tonti
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINE CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINE CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01H85/06
- IPC分类号: H01H85/06 ; H01L21/336 ; H01L21/44
摘要:
Electrically programmable fuse structures for an integrated circuit and methods of fabrication thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first terminal portion and the second terminal portion reside over a first support and a second support, respectively, with the first support and the second support being spaced apart, and the fuse element bridging the distance between the first terminal portion over the first support and the second terminal portion over the second support. The fuse, first support and second support define a π-shaped structure in elevational cross-section through the fuse element. The first terminal portion, second terminal portion and fuse element are coplanar, with the fuse element residing above a void, which in one embodiment is filed by a thermally insulating dielectric material that surrounds the fuse element.
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