发明申请
- 专利标题： Integrated Chemical Microreactor With Large Area Channels and Manufacturing Process Thereof
- 专利标题（中）： 具有大面积通道的综合化学微反应器及其制造工艺
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申请号： US11743062申请日： 2007-05-01
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公开(公告)号： US20070252224A1公开(公告)日： 2007-11-01
- 发明人: Gabriele Barlocchi , Ubaldo Mastromatteo , Flavio Villa
- 申请人： Gabriele Barlocchi , Ubaldo Mastromatteo , Flavio Villa
- 申请人地址： IT Agrate Brianza
- 专利权人： STMicroelectronics S.r.l.
- 当前专利权人： STMicroelectronics S.r.l.
- 当前专利权人地址： IT Agrate Brianza
- 优先权： EP03425770.9 20031128; EP00830148.3 20000229
- 主分类号： H01L29/00
- IPC分类号： H01L29/00 ; H01L21/00
摘要：
The microreactor has a body of semiconductor material; a large area buried channel extending in the body and having walls; a coating layer of insulating material coating the walls of the channel; a diaphragm extending on top of the body and upwardly closing the channel. The diaphragm is formed by a semiconductor layer completely encircling mask portions of insulating material.