发明申请
- 专利标题: Semiconductor Devices Having Gate Structures and Contact Pads that are Lower than the Gate Structures
- 专利标题(中): 具有栅极结构和低于栅极结构的接触焊盘的半导体器件
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申请号: US11779477申请日: 2007-07-18
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公开(公告)号: US20070257324A1公开(公告)日: 2007-11-08
- 发明人: Deok-Hyung Lee , Si-Young Choi , Byeong-Chan Lee , Chul-Sung Kim , In-Soo Jung , Jong-Ryeol Yoo
- 申请人: Deok-Hyung Lee , Si-Young Choi , Byeong-Chan Lee , Chul-Sung Kim , In-Soo Jung , Jong-Ryeol Yoo
- 优先权: KR2003-9916 20030217
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
Semiconductor devices have gate structures on a semiconductor substrate with first spacers on sidewalls of the respective gate structures. First contact pads are positioned between the gate structures and have heights lower than the heights of the gate structures. Second spacers are disposed on sidewalls of the first spacers and on exposed sidewalls of the first contact pads. Second contact pads are disposed on the first contact pads.
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