发明申请
- 专利标题: Negative resists based on acid-catalyzed elimination of polar molecules
- 专利标题(中): 基于酸催化消除极性分子的负电阻
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申请号: US11820862申请日: 2007-06-20
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公开(公告)号: US20070259274A1公开(公告)日: 2007-11-08
- 发明人: Robert Allen , Gregory Breyta , Phillip Brock , Richard DiPietro , David Medeiros , Ratnam Sooriyakumaran
- 申请人: Robert Allen , Gregory Breyta , Phillip Brock , Richard DiPietro , David Medeiros , Ratnam Sooriyakumaran
- 申请人地址: US NY Armonk 10504
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk 10504
- 主分类号: G03C1/705
- IPC分类号: G03C1/705 ; G03C5/16
摘要:
The present invention provides polymers that are useful in negative resist compositions. Polymers of the present invention comprise (1) a first monomer having a polar functional group; (2) a second monomer; and optionally, (3) a third monomer that imparts at least one characteristic selected from crosslinkable functionality, etch resistance, and solubility modulation. The first monomer provides an acid catalyzed polarity switch upon elimination of the polar functional group, whereas, the second monomer provides aqueous dissolution. The polymers of the present invention may be incorporated into negative resist compositions, which may also include photoacid generators, crosslinking agents, basic compounds, solvents, dissolution accelerators, photobase generators, latent basic compounds, surfactants, adhesion promoters, and anti-foaming agents.
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