发明申请
- 专利标题: NON-VOLATILE MEMORY DEVICES AND METHODS FOR FORMING THE SAME
- 专利标题(中): 非易失性存储器件及其形成方法
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申请号: US11613329申请日: 2006-12-20
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公开(公告)号: US20070259505A1公开(公告)日: 2007-11-08
- 发明人: Young-Woo Park , Jung-Dal Choi
- 申请人: Young-Woo Park , Jung-Dal Choi
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2006-39651 20060502
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Non-volatile memory devices and methods for forming the same are provided. A device isolation layer may be formed on the semiconductor substrate to define an active region. A tunneling insulation pattern, a charge storage pattern, and a blocking insulation pattern may be disposed on the active region. A gate electrode may be disposed on the blocking insulation pattern. The charge storage pattern may be arranged in a matrix and a lower surface thereof is higher than an upper surface of the device isolation layer.
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