发明申请
US20070259505A1 NON-VOLATILE MEMORY DEVICES AND METHODS FOR FORMING THE SAME 审中-公开
非易失性存储器件及其形成方法

NON-VOLATILE MEMORY DEVICES AND METHODS FOR FORMING THE SAME
摘要:
Non-volatile memory devices and methods for forming the same are provided. A device isolation layer may be formed on the semiconductor substrate to define an active region. A tunneling insulation pattern, a charge storage pattern, and a blocking insulation pattern may be disposed on the active region. A gate electrode may be disposed on the blocking insulation pattern. The charge storage pattern may be arranged in a matrix and a lower surface thereof is higher than an upper surface of the device isolation layer.
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