发明申请
- 专利标题： Acceleration sensor and method of producing the same
- 专利标题（中）： 加速度传感器及其制造方法
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申请号： US11706281申请日： 2007-02-15
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公开(公告)号： US20070261490A1公开(公告)日： 2007-11-15
- 发明人: Takayuki Kai
- 申请人： Takayuki Kai
- 专利权人： Oki Electric Industry Co., Ltd.,Miyazaki Oki Electric Industry Co., Ltd.
- 当前专利权人： Oki Electric Industry Co., Ltd.,Miyazaki Oki Electric Industry Co., Ltd.
- 优先权： JP2006-131755 20060510
- 主分类号： G01P15/09
- IPC分类号： G01P15/09 ; H01L21/00
摘要：
An acceleration sensor includes a weight; a base portion, a beam; and a piezo resistance element. The weight is arranged to displace upon receiving acceleration. The base portion is disposed around the weight apart from the weight. The beam has one end portion connected to the weight and the other end portion connected to the base portion. The beam also has a thick layer portion and a thin layer portion having a thickness smaller than that of the thick layer portion. The piezo resistance element is disposed over the thick layer portion and the thin layer portion.
公开/授权文献
- US08067812B2 Acceleration sensor and method of producing the same 公开/授权日：2011-11-29
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