Invention Application
- Patent Title: Acceleration sensor and method of producing the same
- Patent Title (中): 加速度传感器及其制造方法
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Application No.: US11706281Application Date: 2007-02-15
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Publication No.: US20070261490A1Publication Date: 2007-11-15
- Inventor: Takayuki Kai
- Applicant: Takayuki Kai
- Assignee: Oki Electric Industry Co., Ltd.,Miyazaki Oki Electric Industry Co., Ltd.
- Current Assignee: Oki Electric Industry Co., Ltd.,Miyazaki Oki Electric Industry Co., Ltd.
- Priority: JP2006-131755 20060510
- Main IPC: G01P15/09
- IPC: G01P15/09 ; H01L21/00

Abstract:
An acceleration sensor includes a weight; a base portion, a beam; and a piezo resistance element. The weight is arranged to displace upon receiving acceleration. The base portion is disposed around the weight apart from the weight. The beam has one end portion connected to the weight and the other end portion connected to the base portion. The beam also has a thick layer portion and a thin layer portion having a thickness smaller than that of the thick layer portion. The piezo resistance element is disposed over the thick layer portion and the thin layer portion.
Public/Granted literature
- US08067812B2 Acceleration sensor and method of producing the same Public/Granted day:2011-11-29
Information query
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