发明申请
- 专利标题: Magnetic recording head with overlaid leads
- 专利标题(中): 带重叠导线的磁记录头
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申请号: US11437585申请日: 2006-05-19
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公开(公告)号: US20070266550A1公开(公告)日: 2007-11-22
- 发明人: Tsung Yuan Chen , Kuok San Ho , Mustafa Michael Pinarbasi
- 申请人: Tsung Yuan Chen , Kuok San Ho , Mustafa Michael Pinarbasi
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H05K3/02
摘要:
A read head for a disk drive and a method of fabricating the read head with overlaid lead pads that contact the top surface of the sensor between the hardbias structures to define the electrically active region of the sensor are described. The invention deposits the GMR and lead layers before milling away the unwanted material. A photoresist mask with a hole defining the active area of the sensor is preferably patterned over a layer of DLC that is formed into a mask. A selected portion of the exposed lead material is then removed using the DLC as a mask defining the active region of the sensor. A photoresist mask pad is patterned to define the full sensor width. The excess sensor and lead material exposed around the mask is milled away. The layers for the hardbias structure are deposited.
公开/授权文献
- US07500303B2 Method of fabricating a magnetic sensor on a wafer 公开/授权日:2009-03-10