发明申请
US20070267939A1 Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator
失效
用于改进微机电系统（MEMS）静电致动器的控制的系统和方法
- 专利标题： Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator
- 专利标题（中）： 用于改进微机电系统（MEMS）静电致动器的控制的系统和方法
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申请号： US11436411申请日： 2006-05-18
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公开(公告)号： US20070267939A1公开(公告)日： 2007-11-22
- 发明人: Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
- 申请人： Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
- 专利权人： THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人： THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM
- 主分类号： H02N1/00
- IPC分类号： H02N1/00
摘要：
Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
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