发明申请
US20070268746A1 Nonvolatile memory device performing 2-bit operation and method of manufacturing the same
审中-公开
执行2位操作的非易失性存储器件及其制造方法
- 专利标题: Nonvolatile memory device performing 2-bit operation and method of manufacturing the same
- 专利标题(中): 执行2位操作的非易失性存储器件及其制造方法
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申请号: US11657133申请日: 2007-01-24
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公开(公告)号: US20070268746A1公开(公告)日: 2007-11-22
- 发明人: Byung-yong Choi , Byung-gook Park , Dong-gun Park , Choong-ho Lee
- 申请人: Byung-yong Choi , Byung-gook Park , Dong-gun Park , Choong-ho Lee
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2006-0043948 20060516
- 主分类号: G11C11/34
- IPC分类号: G11C11/34
摘要:
A nonvolatile memory device includes active regions extending in a word line direction in a semiconductor substrate and defined in a first zigzag pattern; gates extending in the word line direction and formed in a second zigzag pattern that repeatedly intersects the active regions in symmetry with the first zigzag pattern; a charge blocking layer, a charge storage layer and a tunnel dielectric layer below the gate; and source and drain regions each formed outside both sides of the gate.
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