发明申请
- 专利标题: Fabrication of conductive micro traces using a deform and selective removal process
- 专利标题(中): 使用变形和选择性去除工艺制造导电微迹线
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申请号: US11804473申请日: 2007-05-18
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公开(公告)号: US20070269935A1公开(公告)日: 2007-11-22
- 发明人: Rajiv Pethe , Michael A. Kast , Scott C-J. Tseng , Neil Bergstrom , Julius Kozak
- 申请人: Rajiv Pethe , Michael A. Kast , Scott C-J. Tseng , Neil Bergstrom , Julius Kozak
- 主分类号: H01L21/82
- IPC分类号: H01L21/82
摘要:
In a method of forming micro traces, stamping techniques are employed to define a target pattern of the micro traces. The stamping is applied to electrically conductive material and may be limited to pressure, but a thermal stamping approach may be utilized. Following the stamping, a portion of the conductive material is removed, leaving the target pattern of conductive micro traces. In the pressure-application step, the pressure or the combination of pressure and temperature is sufficient to at least weaken the integrity of the bulk conductive material along the area of contact. Typically, this step causes shearing of the conductive material. Following the pressure-application step, excess conductive material is removed. In some embodiments of the invention, the thickness of the micro traces is not determined in a single step. The original thickness may be formed using a “seed” material. The subsequent material buildup may occur after the target pattern is established.
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