Invention Application
- Patent Title: Transfer/Inspection Apparatus and Transfer Apparatus
- Patent Title (中): 转运/检验设备及转运设备
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Application No.: US11660866Application Date: 2004-08-27
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Publication No.: US20070273875A1Publication Date: 2007-11-29
- Inventor: Tamaya Ubukata , Fow-lai Poh , Masahiro Yaguchi
- Applicant: Tamaya Ubukata , Fow-lai Poh , Masahiro Yaguchi
- Applicant Address: JP TOCHIGI
- Assignee: TSUKUBA SEIKO LTD.
- Current Assignee: TSUKUBA SEIKO LTD.
- Current Assignee Address: JP TOCHIGI
- International Application: PCT/JP04/12362 WO 20040827
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
The invention is to provide a transfer/inspection apparatus capable of inspecting any defect even during transferring and to provide a transfer/inspection apparatus capable of inspecting any defect in a non-contact state during transferring, even if the an object to be transferred is a transparent material. The transfer/inspection apparatus includes a transfer apparatus 2, and a defect inspector 3. The transfer apparatus 2 transfers a thin member 5 in a non-contacted state under control of voltage to be applied to an electrode face, and the defect inspector inspects any defect of the thin member during transferring the thin member. The transfer apparatus 2 is preferably provided with a light beam-transmitting portion (omitted portion 15) at a part of the electrode face for allowing the light beam therethrough. When the defect inspector 3 is arranged by utilizing the light beam-transmitting portion 15, the defect can be inspected in the non-contact manner during transferring, even if the object to be transferred is the transparent material.
Public/Granted literature
- US07692778B2 Transfer/inspection apparatus and transfer apparatus Public/Granted day:2010-04-06
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