发明申请
- 专利标题: Reflection characteristic measuring apparatus
- 专利标题(中): 反射特性测量装置
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申请号: US11805486申请日: 2007-05-23
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公开(公告)号: US20070273886A1公开(公告)日: 2007-11-29
- 发明人: Jun Matsumoto , Kenji Imura , Yoshihiro Okui
- 申请人: Jun Matsumoto , Kenji Imura , Yoshihiro Okui
- 专利权人: KONICA MINOLTA SENSING, INC.
- 当前专利权人: KONICA MINOLTA SENSING, INC.
- 优先权: JP2006-142368 20060523
- 主分类号: G01N21/55
- IPC分类号: G01N21/55 ; G01N21/47
摘要:
A reflection characteristic measuring apparatus includes: at least one illuminator for illuminating a sample surface to be measured with light; a plurality of light receiving sections each adapted for receiving the light reflected on the sample surface illuminated by the light from the illuminator to output two-dimensional light receiving data, respectively; and a deriving section for deriving a characteristic of the sample surface based on a weighted average obtained by applying a weighting factor to each of the light receiving data outputted from the light receiving sections based on an installation condition concerning the illuminator and the light receiving sections, and by averaging the light receiving data weighed with the weighting factors.
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