发明申请
- 专利标题： Radiation sensitive self-assembled monolayers and uses thereof
- 专利标题（中）： 辐射敏感的自组装单层及其用途
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申请号： US11445326申请日： 2006-06-02
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公开(公告)号： US20070278179A1公开(公告)日： 2007-12-06
- 发明人: Ali Afzali-Ardakani , Cherie R. Kagan , Laura L. Kosbar , Sally A. Swanson , Charan Srinivasan
- 申请人： Ali Afzali-Ardakani , Cherie R. Kagan , Laura L. Kosbar , Sally A. Swanson , Charan Srinivasan
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; G03F1/00
摘要：
The invention is directed to a radiation sensitive compound comprising a surface binding group proximate to one end of the compound for attachment to a substrate, and a metal binding group proximate to an opposite end of the compound. The metal binding group is not radiation sensitive. The radiation sensitive compound also includes a body portion disposed between the surface binding group and the metal binding group, and a radiation sensitive group positioned in the body portion or adjacent to the metal binding group. The surface binding group is capable of attaching to a substrate selected from a metal, a metal oxide, or a semiconductor material.