发明申请
US20070279155A1 Film bulk acoustic resonator, filter, and fabrication method thereof
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薄膜体声波谐振器，滤波器及其制造方法
- 专利标题： Film bulk acoustic resonator, filter, and fabrication method thereof
- 专利标题（中）： 薄膜体声波谐振器，滤波器及其制造方法
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申请号： US11806123申请日： 2007-05-30
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公开(公告)号： US20070279155A1公开(公告)日： 2007-12-06
- 发明人: Takashi Uno , Naohiro Tsurumi , Kazuhiro Yahata , Hiroyuki Sakai
- 申请人： Takashi Uno , Naohiro Tsurumi , Kazuhiro Yahata , Hiroyuki Sakai
- 优先权： JP2006-149755 20060530; JP2006-203023 20060726
- 主分类号： H03H9/56
- IPC分类号： H03H9/56
摘要：
A film bulk acoustic resonator includes a substrate; an acoustic reflector portion formed on the substrate; and an acoustic resonator portion including a lower electrode, a piezoelectric film, and an upper electrode which are sequentially stacked on the acoustic reflector portion, An uppermost layer of the acoustic reflector portion which is in contact with the acoustic resonator portion has a root-mean-square roughness of approximately 1 nm or less.
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