发明申请
- 专利标题: Two-axis geomagnetic sensor and method for manufacturing the same
- 专利标题(中): 二轴地磁传感器及其制造方法
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申请号: US11637767申请日: 2006-12-13
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公开(公告)号: US20070283585A1公开(公告)日: 2007-12-13
- 发明人: Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
- 申请人: Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2006-0052618 20060612
- 主分类号: E21B47/00
- IPC分类号: E21B47/00
摘要:
A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.
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