发明申请
US20070290210A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LTPS FILM 审中-公开
半导体器件和制造LTPS膜的方法

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LTPS FILM
摘要:
A semiconductor device and a method of fabricating a low-temperature polysilicon film are provided. An amorphous silicon film is formed over a substrate. An insulating layer and a laser absorption layer are formed over the amorphous silicon film. A photolithographic and etching process is performed to remove portions of the laser absorption layer and the insulating layer to expose portions of the amorphous silicon film. A laser crystallization process is utilized to convert the amorphous silicon film into a polysilicon film.
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