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发明申请
US20070290620A1 Portable Microwave Plasma Systems Including A Supply Line For Gas And Microwave 审中-公开
便携式微波等离子体系统，包括气体和微波供应线

Portable Microwave Plasma Systems Including A Supply Line For Gas And Microwave
摘要：
A portable microwave plasma system (10) includes a microwave supply unit (22), a waveguide-to-coax adapter (18) and a waveguide (20) that interconnects the microwave supply unit (22) with the waveguide-to-coax adapter (18), a portable discharge unit (12) and a supply line (16). The supply line (16) includes at least one gas line (62) and a microwave coaxial cable (64). The portable discharge unit (12) includes: a gas flow tube (42) coupled to the supply line (16) to receive gas flow; and a rod-shaped conductor (44) that is axially disposed in the gas flow tube (42) and has an end configured to receive microwaves from the microwave coaxial cable (64) and a tip (46) positioned adjacent the outlet portion of the gas flow tube (42). The tip (46) is configured to focus microwave traveling through the rod-shaped conductor (44) and generate plasma from the gas flow.
摘要（中）：

便携式微波等离子体系统（10）包括微波提供单元（22），波导到同轴适配器（18）和波导（20），其将微波供应单元（22）与波导到同轴电缆适配器 （18），便携式放电单元（12）和供给管线（16）。 供应管线（16）包括至少一条气体管线（62）和微波同轴电缆（64）。 便携式排放单元（12）包括：气体流管（42），其耦合到供应管线（16）以接收气流; 以及杆状导体（44），其轴向地设置在所述气体流管（42）中并且具有被配置为从所述微波同轴电缆（64）接收微波的端部和邻近所述微波同轴电缆的出口部分定位的尖端（46） 气流管（42）。 尖端（46）被配置为聚焦通过杆状导体（44）行进的微波并且从气流产生等离子体。

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