发明申请
- 专利标题: Drive laser for EUV light source
- 专利标题(中): 驱动激光用于EUV光源
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申请号: US11452558申请日: 2006-06-14
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公开(公告)号: US20070291350A1公开(公告)日: 2007-12-20
- 发明人: Alexander I. Ershov , Alexander N. Bykanov , Jerzy R. Hoffman , Igor V. Fomenkov , William N. Partlo
- 申请人: Alexander I. Ershov , Alexander N. Bykanov , Jerzy R. Hoffman , Igor V. Fomenkov , William N. Partlo
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/00
- IPC分类号: H01S3/00
摘要:
A laser light source is disclosed having a laser oscillator producing an output beam; a first amplifier amplifying the output beam to produce a first amplified beam, and a second amplifier amplifying the first amplified beam to produce a second amplified beam. For the source, the first amplifier may have a gain medium characterized by a saturation energy (Es, 1) and a small signal gain (go, 1); and the second amplifier may have a gain medium characterized by a saturation energy (Es, 2) and a small signal gain (go, 2), with (go, 1)>(go, 2) and (Es, 2)>(Es, 1). In another aspect, a laser oscillator of a laser light source may be a cavity dumped laser oscillator, e.g. a mode-locked laser oscillator, q-switched laser oscillator and may further comprising a temporal pulse stretcher.
公开/授权文献
- US07518787B2 Drive laser for EUV light source 公开/授权日:2009-04-14
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