发明申请
- 专利标题: Method for manufacturing magnetic field detecting element, utilizing diffusion of metal
- 专利标题(中): 利用金属扩散制造磁场检测元件的方法
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申请号: US11708537申请日: 2007-02-21
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公开(公告)号: US20070291422A1公开(公告)日: 2007-12-20
- 发明人: Yoshihiro Tsuchiya , Tomohito Mizuno , Kei Hirata , Keita Kawamori , Koji Shimazawa
- 申请人: Yoshihiro Tsuchiya , Tomohito Mizuno , Kei Hirata , Keita Kawamori , Koji Shimazawa
- 申请人地址: JP Tokyo
- 专利权人: TDK Corporation
- 当前专利权人: TDK Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-164574 20060614
- 主分类号: G11B5/39
- IPC分类号: G11B5/39 ; G11B5/33 ; G11B5/48
摘要:
A method for manufacturing a magnetic field detecting element has the steps of: forming stacked layers by sequentially depositing a pinned layer, a spacer layer, a spacer adjoining layer which is adjacent to the spacer layer, a metal layer, and a Heusler alloy layer in this order, such that the layers adjoin each other; and heat treating the stacked layers in order to form the free layer out of the spacer adjoining layer, the metal layer, and the Heusler alloy layer. The spacer adjoining layer is mainly formed of cobalt and iron, and has a body centered cubic structure, and the metal layer is formed of an element selected from the group consisting of silver, gold, copper, palladium, or platinum, or is formed of an alloy thereof.
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