发明申请
US20070292975A1 TRANSFER MOLDING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
失效
用于制造半导体器件的传输成型装置和方法
- 专利标题: TRANSFER MOLDING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- 专利标题(中): 用于制造半导体器件的传输成型装置和方法
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申请号: US11771057申请日: 2007-06-29
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公开(公告)号: US20070292975A1公开(公告)日: 2007-12-20
- 发明人: Hiroyuki Nishi , Akira Sugai
- 申请人: Hiroyuki Nishi , Akira Sugai
- 申请人地址: JP Tokyo
- 专利权人: OKI ELECTRIC INDUSTRY CO., LTD.
- 当前专利权人: OKI ELECTRIC INDUSTRY CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP10-215602 19980730
- 主分类号: H01L21/56
- IPC分类号: H01L21/56
摘要:
A transfer molding apparatus, wherein said top-half mold and said bottom-half mold form a plurality of cavities interconnected, and wherein said pressure adjusting means reduces the pressure of the cavities every time a specified amount of resin is supplied into any one of a plurality of cavities.
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