发明申请
- 专利标题: Bandwidth control device
- 专利标题(中): 带宽控制装置
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申请号: US11472088申请日: 2006-06-21
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公开(公告)号: US20070297467A1公开(公告)日: 2007-12-27
- 发明人: Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
- 申请人: Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/10
- IPC分类号: H01S3/10
摘要:
A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
公开/授权文献
- US08259764B2 Bandwidth control device 公开/授权日:2012-09-04