发明申请
US20070299345A1 Capacitive Ultrasonic Transducer and Endo Cavity Ultrasonic Diagnosis System Using the Same
审中-公开
电容式超声波传感器和内腔超声诊断系统使用它
- 专利标题： Capacitive Ultrasonic Transducer and Endo Cavity Ultrasonic Diagnosis System Using the Same
- 专利标题（中）： 电容式超声波传感器和内腔超声诊断系统使用它
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申请号： US11666372申请日： 2005-10-20
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公开(公告)号： US20070299345A1公开(公告)日： 2007-12-27
- 发明人: Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Atsushi Osawa , Tatsuo Kaimai , Shinji Yasunaga , Kiyoshi Nemoto , Miyuki Murakami , Kousei Tamiya , Yu Kondo
- 申请人： Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Atsushi Osawa , Tatsuo Kaimai , Shinji Yasunaga , Kiyoshi Nemoto , Miyuki Murakami , Kousei Tamiya , Yu Kondo
- 优先权： JP2004-312172 20041027; JP2005-014414 20050121; JP2005-014415 20050121
- 国际申请： PCT/JP05/19336 WO 20051020
- 主分类号： A61B8/14
- IPC分类号： A61B8/14 ; H04R31/00
摘要：
A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.
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