发明申请
- 专利标题： Actuator device and method of manufacturing the same
- 专利标题（中）： 执行机构及其制造方法
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申请号： US11820654申请日： 2007-06-20
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公开(公告)号： US20080007140A1公开(公告)日： 2008-01-10
- 发明人: Tomoo Izumi , Akira Kosaka , Mitsuhiro Fukuda
- 申请人： Tomoo Izumi , Akira Kosaka , Mitsuhiro Fukuda
- 专利权人： KONICA MINOLTA OPTO, INC.
- 当前专利权人： KONICA MINOLTA OPTO, INC.
- 优先权： JP2006-176305 20060627; JP2007-152460 20070608
- 主分类号： H01L41/083
- IPC分类号： H01L41/083 ; H01L21/47 ; H01L41/04
摘要：
An actuator device which is made as a laminated structure including a displacement-functioning layer having a region to be deformed by the electric field and an electrode-functioning layer having a region to function as an electrode. And an manufacturing method in which the above-mentioned device is easily manufactured, the method in which, according to the laminated structure, arranging each layer to be formed on the transfer section and transferring it onto the substrate to laminate.
公开/授权文献
- US07576475B2 Actuator device and method of manufacturing the same 公开/授权日：2009-08-18