发明申请
US20080007888A1 Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
有权
微机电系统(MEMS)可变电容器及其驱动元件及相关方法
- 专利标题: Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
- 专利标题(中): 微机电系统(MEMS)可变电容器及其驱动元件及相关方法
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申请号: US11715676申请日: 2007-03-08
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公开(公告)号: US20080007888A1公开(公告)日: 2008-01-10
- 发明人: Arthur Morris , John Huang
- 申请人: Arthur Morris , John Huang
- 专利权人: Wispry Inc.
- 当前专利权人: Wispry Inc.
- 主分类号: H01G5/16
- IPC分类号: H01G5/16
摘要:
Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
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