发明申请
US20080009084A1 System and method for digital light valve processing 有权
数字光阀处理系统及方法

System and method for digital light valve processing
摘要:
A system and method are provided for processing a semiconductor film using a digital light valve. The method enables pixel elements from an array of selectable pixel elements; gates a light in response to enabling the pixel elements; exposes selected areas of a semiconductor film, such as Si, to the gated light; and, creates light-related reactions in the semiconductor film, in response to the light exposure. More specifically, enabling pixel elements from an array of selectable pixel elements may include: exposing a digital light valve array of selectable pixel elements to the light; enabling a pattern of pixel elements; and, transmitting light from the pattern of enabled pixel elements. Examples of light-related reactions include changing the topology of a film surface, creating a chemical reaction, diffusing a dopant, activating a dopant, alloying the semiconductor film, and changing the semiconductor crystalline structure.
公开/授权文献
信息查询
0/0