发明申请
- 专利标题: System and method for digital light valve processing
- 专利标题(中): 数字光阀处理系统及方法
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申请号: US11524607申请日: 2006-09-21
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公开(公告)号: US20080009084A1公开(公告)日: 2008-01-10
- 发明人: John W. Hartzell
- 申请人: John W. Hartzell
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A system and method are provided for processing a semiconductor film using a digital light valve. The method enables pixel elements from an array of selectable pixel elements; gates a light in response to enabling the pixel elements; exposes selected areas of a semiconductor film, such as Si, to the gated light; and, creates light-related reactions in the semiconductor film, in response to the light exposure. More specifically, enabling pixel elements from an array of selectable pixel elements may include: exposing a digital light valve array of selectable pixel elements to the light; enabling a pattern of pixel elements; and, transmitting light from the pattern of enabled pixel elements. Examples of light-related reactions include changing the topology of a film surface, creating a chemical reaction, diffusing a dopant, activating a dopant, alloying the semiconductor film, and changing the semiconductor crystalline structure.
公开/授权文献
- US07696070B2 System and method for digital light valve processing 公开/授权日:2010-04-13
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