发明申请
- 专利标题： Spatial light modulator featured with an anti-reflective structure
- 专利标题（中）： 具有抗反射结构的空间光调制器
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申请号： US11827552申请日： 2007-07-11
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公开(公告)号： US20080013157A1公开(公告)日： 2008-01-17
- 发明人: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
- 申请人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
- 主分类号： G02F1/29
- IPC分类号： G02F1/29
摘要：
A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure,
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