发明申请
- 专利标题: OPTICAL DEVICE AND ITS MANUFACTURING METHOD, AND OPTICAL DEVICE WAFER
- 专利标题(中): 光学器件及其制造方法和光学器件波形
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申请号: US11768239申请日: 2007-06-26
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公开(公告)号: US20080013583A1公开(公告)日: 2008-01-17
- 发明人: Yasutaka IMAI
- 申请人: Yasutaka IMAI
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-194189 20060714
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01L31/18
摘要:
A method for manufacturing an optical device, the method includes the steps of: forming a multilayer film, including forming a first mirror above a substrate, forming an active layer above the first mirror, forming a second mirror above the active layer, forming a semiconductor layer on the second mirror, and forming a sacrificial layer on the semiconductor layer; conducting a reflection coefficient examination on the multilayer film; patterning the multilayer film to form a surface-emitting laser section having the first mirror, the active layer and the second mirror, and a diode section having the semiconductor layer; and removing at least a portion of the sacrificial layer to expose at least a portion of an upper surface of the semiconductor layer, wherein an optical film thickness of the semiconductor layer is formed to be an odd multiple or an even multiple of λ/4, where λ is a design wavelength of light emitted by the surface-emitting laser section, andan optical film thickness of the sacrificial layer is formed not to be an odd multiple or an even multiple of λ/4.
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