发明申请
US20080014456A1 PROCESS OF PRODUCING MASTER CARRIER FOR MAGNETIC TRANSFER 审中-公开
生产用于磁性传输的主载体的方法

PROCESS OF PRODUCING MASTER CARRIER FOR MAGNETIC TRANSFER
摘要:
A process for producing a master carrier contains steps of: forming a desired pattern on a support to form a resist pattern support; forming a first ferromagnetic thin film on the resist pattern support by a vacuum film forming method; forming a third ferromagnetic thick film on the first ferromagnetic thin film by an electroplating; and peeling the support from the resist pattern support provided with the first ferromagnetic thin film and the third ferromagnetic thick film.
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