Invention Application
- Patent Title: Porous inorganic solids for use as low dielectric constant materials
- Patent Title (中): 用作低介电常数材料的多孔无机固体
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Application No.: US11806464Application Date: 2007-05-31
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Publication No.: US20080020197A1Publication Date: 2008-01-24
- Inventor: Michael Ayers
- Applicant: Michael Ayers
- Applicant Address: US NV Las Vegas 89119
- Assignee: Roskilde Semiconductor LLC
- Current Assignee: Roskilde Semiconductor LLC
- Current Assignee Address: US NV Las Vegas 89119
- Main IPC: B32B3/00
- IPC: B32B3/00 ; B05D1/00 ; B05D3/00

Abstract:
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
Public/Granted literature
- US07875315B2 Porous inorganic solids for use as low dielectric constant materials Public/Granted day:2011-01-25
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