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US20080020197A1 Porous inorganic solids for use as low dielectric constant materials 失效
用作低介电常数材料的多孔无机固体

Porous inorganic solids for use as low dielectric constant materials
Abstract:
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
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