发明申请
- 专利标题: FIBER-OPTIC MINIATURE ENCODER FOR FINE PITCH SCALES
- 专利标题(中): 光纤小型编码器,用于细微尺寸
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申请号: US11461423申请日: 2006-07-31
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公开(公告)号: US20080024789A1公开(公告)日: 2008-01-31
- 发明人: Joseph D. Tobiason , Eric Herbert Altendorf
- 申请人: Joseph D. Tobiason , Eric Herbert Altendorf
- 申请人地址: JP Kawasaki-shi
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki-shi
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into ±1st order beams, a pair of mirrors that reflect the ±1st order beams to converge toward the scale grating. The ±1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only ±1st order light reaches the receiver channels.
公开/授权文献
- US07502122B2 Fiber-optic miniature encoder for fine pitch scales 公开/授权日:2009-03-10
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