发明申请
- 专利标题： Device manufacturing support apparatus, simulation method for device manufacturing support apparatus, and device manufacturing apparatus
- 专利标题（中）： 装置制造支援装置，装置制造支援装置的模拟方法以及装置制造装置
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申请号： US11607995申请日： 2006-12-04
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公开(公告)号： US20080027691A1公开(公告)日： 2008-01-31
- 发明人: Hiroki Kobayashi , Yuichi Sato , Masayoshi Hashima
- 申请人： Hiroki Kobayashi , Yuichi Sato , Masayoshi Hashima
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JP2006-208201 20060731
- 主分类号： G06G7/48
- IPC分类号： G06G7/48
摘要：
In a device manufacturing support apparatus, shape models having variations are generated by a process simulator simulating a manufacturing process, and a result thereof is input to a device simulator. Then, characteristic variations of a device are evaluated, an optimal value and an acceptable range of a parameter are estimated, and simulation is performed again by using the parameter. This process is repeated so as to determine the optimal value and acceptable range of the parameter.
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