发明申请
US20080029763A1 Transmission Circuit, Connecting Sheet, Probe Sheet, Probe Card, Semiconductor Inspection System and Method of Manufacturing Semiconductor Device
审中-公开
传输电路,连接片,探头片,探针卡,半导体检测系统及制造半导体器件的方法
- 专利标题: Transmission Circuit, Connecting Sheet, Probe Sheet, Probe Card, Semiconductor Inspection System and Method of Manufacturing Semiconductor Device
- 专利标题(中): 传输电路,连接片,探头片,探针卡,半导体检测系统及制造半导体器件的方法
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申请号: US11740301申请日: 2007-04-26
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公开(公告)号: US20080029763A1公开(公告)日: 2008-02-07
- 发明人: Susumu Kasukabe , Terutaka Mori , Yasunori Narizuka , Norio Chujo
- 申请人: Susumu Kasukabe , Terutaka Mori , Yasunori Narizuka , Norio Chujo
- 优先权: JP2006-136596 20060516
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; G01R31/26 ; H01L23/58 ; H01L29/40
摘要:
A probe sheet or a connecting sheet with good transmission characteristics and flexibility comprising contact terminals capable of contacting at a plurality of points and in high density, without applying damages on an electrode pad which is a contact subject is provided. Further, a high-speed transmission circuit capable of designing signal wirings with aligned impedance to have wide width even with a thin insulating film is achieved to provide a probe sheet or a connecting sheet with reduced loss of high-speed transmission signals. Moreover, the transmission circuit is applied to a probe card using a probe sheet, an inspecting method of (a method of manufacturing) a semiconductor device using the same, and a connecting sheet having an excellent high-frequency characteristic.