Invention Application
US20080029816A1 Process for integrating on an inert substrate a device comprising at least a passive element and an active element and corresponding integrated device
有权
用于在惰性基板上集成至少包括无源元件和有源元件的器件以及相应的集成器件的工艺
- Patent Title: Process for integrating on an inert substrate a device comprising at least a passive element and an active element and corresponding integrated device
- Patent Title (中): 用于在惰性基板上集成至少包括无源元件和有源元件的器件以及相应的集成器件的工艺
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Application No.: US11803716Application Date: 2007-05-14
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Publication No.: US20080029816A1Publication Date: 2008-02-07
- Inventor: Salvatore Leonardi , Salvatore Coffa , Claudia Caligiore , Francesca Tramontana
- Applicant: Salvatore Leonardi , Salvatore Coffa , Claudia Caligiore , Francesca Tramontana
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S. r. l.
- Current Assignee: STMicroelectronics S. r. l.
- Current Assignee Address: IT Agrate Brianza
- Priority: EP06425328.9 20060515
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L21/00

Abstract:
A process is described for integrating, on an inert substrate, a device having at least one passive component and one active component. The process comprises: deposition of a protection dielectric layer on the inert substrate; formation of a polysilicon island on the protection dielectric layer; integration of the active component on the polysilicon island; deposition of the covering dielectric layer on the protection dielectric layer and on the active component; integration of the passive component on the covering dielectric layer; formation of first contact structures in openings realised in the covering dielectric layer in correspondence with active regions of the active component; and formation of second contact structures in correspondence with the passive component. An integrated device obtained through this process is also described.
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