Invention Application
- Patent Title: Physical quantity sensor
- Patent Title (中): 物理量传感器
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Application No.: US11808774Application Date: 2007-06-12
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Publication No.: US20080030205A1Publication Date: 2008-02-07
- Inventor: Tetsuo Fujii , Eishi Kawasaki
- Applicant: Tetsuo Fujii , Eishi Kawasaki
- Applicant Address: JP Kariya-city
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya-city
- Priority: JP2006-163877 20060613; JP2007-060596 20070309
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01L9/12

Abstract:
A physical quantity sensor for detecting a physical quantity includes: a first substrate having a first physical quantity detection element; a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and an accommodation space disposed between the first substrate and the second substrate. The first physical quantity detection element is disposed in the accommodation space. The first physical quantity detection element is protected with the first substrate and the second substrate since the first physical quantity detection element is sealed in the accommodation space.
Public/Granted literature
- US07540199B2 Physical quantity sensor Public/Granted day:2009-06-02
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