Invention Application
- Patent Title: METHOD OF SEPARATING SEMICONDUCTOR DIES
- Patent Title (中): 分离半导体器件的方法
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Application No.: US11835289Application Date: 2007-08-07
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Publication No.: US20080032488A1Publication Date: 2008-02-07
- Inventor: JIUNN-YI CHU , Chao-Chen Cheng , Chen-Fu Chu , Trung Tri Doan
- Applicant: JIUNN-YI CHU , Chao-Chen Cheng , Chen-Fu Chu , Trung Tri Doan
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
A method for the separation of multiple dies during semiconductor fabrication is described. On an upper surface of a semiconductor wafer containing multiple dies, a seed metal layer may be used to grow hard metal layers above it for handling. Metal may be plated above these metal layers everywhere except where a block of stop electroplating (EP) material exists. The stop EP material may be obliterated, and a barrier layer may be formed above the entire remaining structure. The substrate may be removed, and the individual dies may have any desired bonding pads and/or patterned circuitry added to the semiconductor surface. The remerged hard metal after laser cutting and heating should be strong enough for handling. Tape may be added to the wafer, and a breaker may be used to break the dies apart. The resulting structure may be flipped over, and the tape may be expanded to separate the individual dies.
Public/Granted literature
- US07829440B2 Method of separating semiconductor dies Public/Granted day:2010-11-09
Information query
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