Invention Application
- Patent Title: REMOVABLE WAFER EXPANDER FOR DIE BONDING EQUIPMENT
- Patent Title (中): 用于DIE结合设备的可拆卸的WAFER扩展器
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Application No.: US11833605Application Date: 2007-08-03
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Publication No.: US20080032489A1Publication Date: 2008-02-07
- Inventor: Kevin Formosa
- Applicant: Kevin Formosa
- Applicant Address: MT Kirkop ZRQ 10
- Assignee: STMICROELECTRONICS LTD.
- Current Assignee: STMICROELECTRONICS LTD.
- Current Assignee Address: MT Kirkop ZRQ 10
- Priority: EP06118420.6 20060803
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
A removable wafer expander for die bonding equipment for a singularized wafer supported by a flexible sticky substrate, the removable wafer expander provided with a first ring member to be coupled with a second ring member for remote expansion of the flexible sticky substrate therebetween before the mounting of the wafer expander onto the die bonding equipment.
Public/Granted literature
- US07675170B2 Removable wafer expander for die bonding equipment Public/Granted day:2010-03-09
Information query
IPC分类: