Invention Application
US20080032489A1 REMOVABLE WAFER EXPANDER FOR DIE BONDING EQUIPMENT 有权
用于DIE结合设备的可拆卸的WAFER扩展器

  • Patent Title: REMOVABLE WAFER EXPANDER FOR DIE BONDING EQUIPMENT
  • Patent Title (中): 用于DIE结合设备的可拆卸的WAFER扩展器
  • Application No.: US11833605
    Application Date: 2007-08-03
  • Publication No.: US20080032489A1
    Publication Date: 2008-02-07
  • Inventor: Kevin Formosa
  • Applicant: Kevin Formosa
  • Applicant Address: MT Kirkop ZRQ 10
  • Assignee: STMICROELECTRONICS LTD.
  • Current Assignee: STMICROELECTRONICS LTD.
  • Current Assignee Address: MT Kirkop ZRQ 10
  • Priority: EP06118420.6 20060803
  • Main IPC: H01L21/683
  • IPC: H01L21/683
REMOVABLE WAFER EXPANDER FOR DIE BONDING EQUIPMENT
Abstract:
A removable wafer expander for die bonding equipment for a singularized wafer supported by a flexible sticky substrate, the removable wafer expander provided with a first ring member to be coupled with a second ring member for remote expansion of the flexible sticky substrate therebetween before the mounting of the wafer expander onto the die bonding equipment.
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