发明申请
- 专利标题: Large area integration of quartz resonators with electronics
- 专利标题(中): 石英谐振器与电子部件的大面积集成
-
申请号: US11502336申请日: 2006-08-09
-
公开(公告)号: US20080034575A1公开(公告)日: 2008-02-14
- 发明人: David T. Chang , Randall L. Kubena
- 申请人: David T. Chang , Randall L. Kubena
- 主分类号: H04R31/00
- IPC分类号: H04R31/00
摘要:
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
公开/授权文献
- US07555824B2 Method for large scale integration of quartz-based devices 公开/授权日:2009-07-07
信息查询