发明申请
US20080034575A1 Large area integration of quartz resonators with electronics 有权
石英谐振器与电子部件的大面积集成

  • 专利标题: Large area integration of quartz resonators with electronics
  • 专利标题(中): 石英谐振器与电子部件的大面积集成
  • 申请号: US11502336
    申请日: 2006-08-09
  • 公开(公告)号: US20080034575A1
    公开(公告)日: 2008-02-14
  • 发明人: David T. ChangRandall L. Kubena
  • 申请人: David T. ChangRandall L. Kubena
  • 主分类号: H04R31/00
  • IPC分类号: H04R31/00
Large area integration of quartz resonators with electronics
摘要:
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
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