发明申请
- 专利标题: Adjustment Mechanism
- 专利标题(中): 调整机制
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申请号: US11464593申请日: 2006-08-15
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公开(公告)号: US20080036480A1公开(公告)日: 2008-02-14
- 发明人: Eric D. Hobbs , Christopher D. McCoy , James M. Porter , Alexander H. Slocum
- 申请人: Eric D. Hobbs , Christopher D. McCoy , James M. Porter , Alexander H. Slocum
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe card assembly can comprise a support structure to which a plurality of probes can be directly or indirectly attached. The probes can be disposed to contact an electronic device to be tested. The probe card assembly can further comprise actuators, which can be configured to change selectively an attitude of the support structure with respect to a reference structure. The probe card assembly can also comprise a plurality of lockable compliant structures. While unlocked, the lockable compliant structures can allow the support structure to move with respect to the reference structure. While locked, however, the compliant structures can provide mechanical resistance to movement of the support structure with respect to the reference structure.
公开/授权文献
- US07368930B2 Adjustment mechanism 公开/授权日:2008-05-06