Invention Application
- Patent Title: Manufacturable micropositioning system
- Patent Title (中): 可制造微定位系统
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Application No.: US11888939Application Date: 2007-08-03
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Publication No.: US20080040069A1Publication Date: 2008-02-14
- Inventor: Wolfram Grziwa , Lothar Westerweck , Klaus Raschke
- Applicant: Wolfram Grziwa , Lothar Westerweck , Klaus Raschke
- Main IPC: G01C19/00
- IPC: G01C19/00

Abstract:
Embodiments of the present invention relate to systems and methods of position sensing that use a sensing target with a pattern of features thereupon, and to positioning modules and systems that position functional elements using such position sensing systems. A position sensing system includes an encoding module and a processing module. The encoding module has an active encoding region through which the sensing target is configured to move. Further, the encoding module is configured to generate a signal based on a portion of the sensing target within the active encoding region. The active encoding region has a dimension greater than the average critical dimension of the pattern of features. The processing module is configured to convert the signal generated into a position data based on an input range condition and an initial position condition.
Public/Granted literature
- US07590505B2 Manufacturable micropositioning system employing sensor target Public/Granted day:2009-09-15
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