Invention Application
- Patent Title: METHOD FOR FABRICATING METALLIC BIT-LINE CONTACTS
- Patent Title (中): 制造金属线对联系的方法
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Application No.: US11929215Application Date: 2007-10-30
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Publication No.: US20080048229A1Publication Date: 2008-02-28
- Inventor: Ralf Staub , Jurgen Amon , Norbert Urbansky
- Applicant: Ralf Staub , Jurgen Amon , Norbert Urbansky
- Priority: DE10119873.6DE 20010424
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A memory cell and method of forming the same is provided. To make contact between a bit line and a select transistor of a dynamic memory unit on a semiconductor wafer, a contact hole is filled with a metal or a metal alloy. A liner layer may be introduced between the semiconductor substrate and the metal filling. The semiconductor substrate has a doped region in the contact hole.
Public/Granted literature
- US07473953B2 Method for fabricating metallic bit-line contacts Public/Granted day:2009-01-06
Information query
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