Invention Application
US20080048229A1 METHOD FOR FABRICATING METALLIC BIT-LINE CONTACTS 有权
制造金属线对联系的方法

METHOD FOR FABRICATING METALLIC BIT-LINE CONTACTS
Abstract:
A memory cell and method of forming the same is provided. To make contact between a bit line and a select transistor of a dynamic memory unit on a semiconductor wafer, a contact hole is filled with a metal or a metal alloy. A liner layer may be introduced between the semiconductor substrate and the metal filling. The semiconductor substrate has a doped region in the contact hole.
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