发明申请
- 专利标题： APPARATUS AND METHOD OF DETECTING SECONDARY ELECTRONS
- 专利标题（中）： 检测二次电子的装置和方法
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申请号： US11751619申请日： 2007-05-21
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公开(公告)号： US20080054180A1公开(公告)日： 2008-03-06
- 发明人: Charles Silver , Lawrence Muray , James Spallas
- 申请人： Charles Silver , Lawrence Muray , James Spallas
- 主分类号： G21K5/04
- IPC分类号： G21K5/04
摘要：
A charged particle beam column package includes an assembly (e.g., comprising a plurality of layers, which can have a component coupled to one of the layers), and a solid state detector coupled to the assembly. Further, at least one of the layers has interconnects thereon.
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