发明申请
- 专利标题: Back-gated field emission electron source
- 专利标题(中): 后门控场发射电子源
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申请号: US11904938申请日: 2007-09-28
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公开(公告)号: US20080067494A1公开(公告)日: 2008-03-20
- 发明人: Victor Mammana , Gary McGuire , Olga Shenderova
- 申请人: Victor Mammana , Gary McGuire , Olga Shenderova
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
A field emitter device consistent with certain embodiments has a substantially planar conductor forming a gate electrode. A conductive stripe forms a cathode on the insulating layer. An insulating layer covers at least a portion of the surface between the cathode and the gate. An anode is positioned above the cathode. An emitter structure, for example of carbon nanotubes is disposed on a surface of the cathodes closest to the anode. When an electric field is generated across the insulating layer, the cathode/emitter structure has a combination of work function and aspect ratio that causes electron emission from the emitter structure toward the anode at a field strength that is lower than that which causes emissions from other regions of the cathode. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
公开/授权文献
- US07893605B2 Back-gated field emission electron source 公开/授权日:2011-02-22
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