Invention Application
- Patent Title: Internal member for plasma-treating vessel and method of producing the same
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Application No.: US11882462Application Date: 2007-08-01
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Publication No.: US20080070051A1Publication Date: 2008-03-20
- Inventor: Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- Applicant: Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- Applicant Address: JP Hyogo JP Tokyo
- Assignee: Tocalo Co., Ltd.,Tokyo Electron Limited
- Current Assignee: Tocalo Co., Ltd.,Tokyo Electron Limited
- Current Assignee Address: JP Hyogo JP Tokyo
- Priority: JP11-351546 19991210
- Main IPC: B32B15/04
- IPC: B32B15/04 ; B05D1/36 ; C09D1/00 ; C23C4/10
Abstract:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
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