发明申请
- 专利标题： Internal member for plasma-treating vessel and method of producing the same
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申请号： US11882462申请日： 2007-08-01
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公开(公告)号： US20080070051A1公开(公告)日： 2008-03-20
- 发明人: Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- 申请人： Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- 申请人地址： JP Hyogo JP Tokyo
- 专利权人： Tocalo Co., Ltd.,Tokyo Electron Limited
- 当前专利权人： Tocalo Co., Ltd.,Tokyo Electron Limited
- 当前专利权人地址： JP Hyogo JP Tokyo
- 优先权： JP11-351546 19991210
- 主分类号： B32B15/04
- IPC分类号： B32B15/04 ; B05D1/36 ; C09D1/00 ; C23C4/10
摘要：
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
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