发明申请
- 专利标题： Device and Method for Scanning Probe Microscopy
- 专利标题（中）： 扫描探针显微镜的装置和方法
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申请号： US11576724申请日： 2005-09-30
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公开(公告)号： US20080072665A1公开(公告)日： 2008-03-27
- 发明人: Jens Struckmeier , Karl Schlagenhauf
- 申请人： Jens Struckmeier , Karl Schlagenhauf
- 申请人地址： DE Dresden
- 专利权人： NAMBITION GMBH
- 当前专利权人： NAMBITION GMBH
- 当前专利权人地址： DE Dresden
- 优先权： DEDE102004048971.8 20041007
- 国际申请： PCT/EP05/10604 WO 20050930
- 主分类号： G01B5/28
- IPC分类号： G01B5/28
摘要：
The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.
公开/授权文献
- US07810166B2 Device and method for scanning probe microscopy 公开/授权日：2010-10-05
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