Invention Application
- Patent Title: Mechanical pump operating well for a long term and method of manufacturing the same
- Patent Title (中): 机械泵长期运行良好，制造方法相同
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Application No.: US11905580Application Date: 2007-10-02
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Publication No.: US20080078503A1Publication Date: 2008-04-03
- Inventor: Tadahiro OHMI , Isao Akutsu
- Applicant: Tadahiro OHMI , Isao Akutsu
- Assignee: National University Corporation Tohoku University,Foundation for Advancement of International Science
- Current Assignee: National University Corporation Tohoku University,Foundation for Advancement of International Science
- Priority: JP2006-271816 20061003
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B05D3/00 ; C30B35/00 ; F04B53/00
Abstract:
A mechanical pump of the present invention is applied to, for example, a screw pump A for exhausting a gas from a processing chamber. The screw pump comprises a gas-exposed region exposed to the gas and an yttria (Y2O3) film formed on the gas-exposed region.
Information query
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