发明申请
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11898528申请日: 2007-09-13
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公开(公告)号: US20080079064A1公开(公告)日: 2008-04-03
- 发明人: Sheng-Chih Lai , Hang-Ting Lue
- 申请人: Sheng-Chih Lai , Hang-Ting Lue
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 优先权: TW95136772 20061003
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L21/336
摘要:
A semiconductor device having a non-volatile memory and a method of manufacturing the same are provided. The semiconductor device includes a base material and a stack structure. The stack structure disposed on the base material at least includes a tunneling layer, a trapping layer and a dielectric layer. The trapping layer is disposed on the tunneling layer. The dielectric layer has a dielectric constant and is disposed on the trapping layer. The dielectric layer is transformed from a first solid state to a second solid state when the dielectric layer undergoes a process.
公开/授权文献
- US07910981B2 Semiconductor device and method of manufacturing the same 公开/授权日:2011-03-22
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