发明申请
- 专利标题： METHOD OF FABRICATING A MIXED MICROTECHNOLOGY STRUCTUE AND A STRUCTURE OBTAINED THEREBY
- 专利标题（中）： 制造混合微生物结构的方法和获得的结构
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申请号： US11857130申请日： 2007-09-18
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公开(公告)号： US20080079123A1公开(公告)日： 2008-04-03
- 发明人: Marek Kostrzewa , Hubert Moriceau , Marc Zussy
- 申请人： Marek Kostrzewa , Hubert Moriceau , Marc Zussy
- 优先权： FR0653820 20060919
- 主分类号： H01L23/58
- IPC分类号： H01L23/58 ; H01L21/31
摘要：
A method of fabricating a mixed microtechnology structure includes providing a provisional substrate including a sacrificial layer on which is formed a mixed layer including at least first patterns of a first material and second patterns of a second material different from the first material, where the first and second patterns reside adjacent the sacrificial layer. The sacrificial layer is removed exposing a mixed surface of the mixed layer, the mixed surface including portions of the first patterns and portions of the second patterns. A continuous is formed covering layer of a third material on the mixed surface by direct bonding.
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