发明申请
US20080084135A1 Universal platform for surface acoustic wave (SAW) based sensors 审中-公开
用于表面声波(SAW)传感器的通用平台

Universal platform for surface acoustic wave (SAW) based sensors
摘要:
A universal platform for surface acoustic wave (SAW) based sensors uses a selective sensing film coating on a piezoelectric substrate depending upon the application and the measurand to be measured. A SAW substrate with one or more IDTs and associated microcontroller-based electronics with a power supply can be implemented in the context of a common sensor platform. The platform can be mass produced and a selective coating utilized. The selective coatings can be adapted for use in a sensor involving, for example, gas sensing humidity (metal oxide semiconductors, Polymers, Zeolites), pressure, temperature (metal oxides whose conductivity vary with temperature), force, torque, strain, stress and applications associated with a variety of physical parameters.
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